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工件查找步骤和故障对应

  • 本资料不对客户实施结果提供保证。实施前请充分确认。
  • 如有任何不明之处,请向本公司服务技术组咨询。


Wafer-Search Operation Procedure

For wafer-search, follow the procedures as follows.

Prepare the necessary equipment
Wafer-search setting 1: Setting of the lowest slot of the cassette (WLO setting)
Wafer-search setting 2: Setting of the highest slot of the cassette (WHI setting)
Wafer-search setting 3: Setting of the number of cassette slots (WFC setting)
Wafer-search setting 4: Setting of the minimum detection width of wafer (WWN setting)
Wafer-search setting 5: Setting of the maximum detection width of wafer (WWM setting)
Wafer-search setting 6: Setting of the detection gate width of wafer (WWG setting)
Wafer-search setting 7: Setting of the stop position of wafer search completion (WEND setting)
Wafer-search setting 8: Setting of the speed of wafer search (WSP setting)
Wafer-search setting 9: Teaching and setting of the start position of wafer search
Wafer-search setting 10: Execution of wafer search
Wafer-search setting 11: Reading out of the wafer search results
Wafer-search setting 12: Reading out of the detection width of wafer search
Wafer-search setting 13: Output the results of wafer-search to I/O
Wafer-search setting 14: Output the results of wafer-search and the wafer condition to I/O

Wafer-Search Troubleshooting

1: Wafer-search sensor does not respond.
2: Error “E08” or “Command Error” occurs and wafer-search does not start.
3: Search failure occurs in the middle slot of the cassette when wafer-search is started.
4: Search failure occurs in the low slot of the cassette when wafer-search is started.
5: Search failure occurs in the top slot of the cassette when wafer-search is started.
6: Search failure occurs when wafer-search is started using a thin wafer.
7: Some wafers cannot be detected with wafer-search.
8: A wafer placed diagonally over the higher and lower cassettes cannot be detected when wafer-search is started.
9: A wafer cannot be detected when wafer-search is started after cassettes have been changed.
10: After changing wafer-search data and its setting, wafer-search data is found to disappear.
11: The results of wafer-search differ between via Parallel I/O and via serial communication.
12: The results or wafer-search differ from the actual wafer condition.